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| About this Book |
Book Title: High Density Plasma Sources: Design, Physics and PerformanceMatsushita Electric Works, Woburn, MA, USA
Authors : Oleg A. Popov
Hardbound, 465 Pages
Published: December 1996
Imprint: William Andrew
ISBN: 978-0-8155-1377-3
Download : (Download the PDF version)
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